Semiconductor chip capable of implementing wire bonding over active circuits

ABSTRACT

A semiconductor chip capable of implementing wire bonding over active circuits (BOAC) is provided. The semiconductor chip includes a bonding pad structure which includes a bondable metal pad, a top interconnection metal layer, a stress-buffering dielectric, and at least a first via plug between the bondable metal pad and the top interconnection metal layer. The semiconductor chip also includes at least an interconnection metal layer, at least a second via plug between the interconnection metal layer and the bonding pad structure, and an active circuit situated underneath the bonding pad structure on a semiconductor substrate.

CROSS REFERENCE TO RELATED APPLICATIONS

This is a continuation application of U.S. patent application Ser. No.10/904,431, filed Nov. 10, 2004.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to the field of semiconductor integratedcircuits, and more particularly, to a semiconductor chip capable ofimplementing wire bonding over active circuits (also referred to as“BOAC”).

2. Description of the Prior Art

Accompanying progress of the semiconductor technology, criticaldimensions of integrated circuits are continually shrunk. Therefore,bonding pads which spread around on a chip are obstacles for reducingthe chip size. For this reason, implementing wire bonding over activecircuits is a trend for chips design and manufacturing.

FIG. 1 is a schematic cross-sectional diagram of a BOAC integratedcircuit structure according to the prior art. As shown in FIG. 1, a BOACintegrated circuit structure 10 of the prior art has a plurality ofactive circuits on a semiconductor substrate 12. The plurality of activecircuits include input/output (I/O) devices/circuits or electrostaticdischarge (ESD) devices/circuits, and are made up ofmetal-oxide-semiconductor field-effect transistors (MOSFET) 14, 16, and18, shallow trench isolations (STI) 20 and 22, ion diffusion regions 24,26, 28, and 30, an inter-layer dielectric (ILD) 32, inter-metaldielectrics (IMD) 34, 36 and 38, and interconnection metal layers 40,42, 44, 46, 48, 50, and 52. A portion of the surface of the topinterconnection metal layer 52 is covered by a barrier layer 54, aprotection layer 56, and a bondable metal pad 58.

According to FIG. 1, in the BOAC integrated circuit structure 10 of theprior art, the top interconnection metal layer 52 is set over thecovering region of the bondable metal pad 58 and electrically links withlower active circuits formed underneath through an outside wire.Therefore, mechanical stresses press on the bondable metal pad 58directly during bonding, and bonds between the bondable metal pad 58,the barrier layer 54, and the top interconnection metal layer 52 and thelower integrated circuits are destroyed. Moreover, the outside wire,which is formed for electrically linking the top interconnection metallayer 52 and the lower active circuits, is unfavorable for chip sizeshrinkage.

SUMMARY OF THE INVENTION

It is therefore a primary objective of the present invention to providea BOAC integrated circuit structure which disposes at least a first viaplug linking a bondable metal pad with a top interconnection metal layerand at least a second via plug linking a bonding pad structure with aninterconnection metal layer beneath the bondable metal pad.

According to the objective of the present invention, a BOAC integratedcircuit structure of the present invention includes a bonding padstructure. The bonding pad structure includes a bondable metal pad, atop interconnection metal layer, a stress-buffering dielectric locatedbetween the bondable metal pad and the top interconnection metal layer,and at least a first via plug disposed beneath the bondable metal pad ina stress-buffering dielectric for electrically linking the bondablemetal pad with the top interconnection metal layer. Moreover, the BOACintegrated circuit structure further includes at least aninterconnection metal layer, at least a second via plug disposed beneaththe bonding pad structure for electrically linking the bonding padstructure with the interconnection metal layer, and an active circuitdisposed beneath the bonding pad structure on a semiconductor substrate.

Since the BOAC integrated circuit structure of the present inventionfurther includes the stress-buffering dielectric between the bondablemetal pad and the top interconnection metal layer, mechanical stressespressing on the top interconnection metal layer directly during bondingwill be reduced. Additionally, the integrated circuit will not bedamaged. In the present invention, since the first via plug linking thebondable metal pad with the top interconnection metal layer and thesecond via plug linking the bonding pad structure with theinterconnection metal layer beneath the bondable metal pad are disposedbeneath the bondable metal pad, the wiring area will be diminished andthe chip size will be shrunk. Moreover, since the wire between thebondable metal pad and the lower active circuit of the present inventionis shorter, the electric characteristics will be better.

These and other objectives of the present invention will no doubt becomeobvious to those of ordinary skill in the art after reading thefollowing detailed description of the preferred embodiment that isillustrated in the various figures and drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a schematic cross-sectional diagram of a BOAC integratedcircuit structure according to the prior art.

FIG. 2 is a schematic cross-sectional diagram of a BOAC integratedcircuit structure according to a first embodiment of the presentinvention.

FIG. 3 is a schematic cross-sectional diagram of a BOAC integratedcircuit structure according to a second embodiment of the presentinvention.

FIG. 4 is a top view of the metal frame according to the secondembodiment of the present invention.

DETAILED DESCRIPTION

Please refer to FIG. 2. FIG. 2 is a schematic cross-sectional diagram ofa BOAC integrated circuit structure according to a first embodiment ofthe present invention. As shown in FIG. 2, a BOAC integrated circuitstructure 60 of the present invention includes a bonding pad structure62 and an active circuit region 64. The bonding pad structure 62 furtherincludes a bondable metal pad 66, a top interconnection metal layer 68,first via plugs 70 and 72 located beneath a section of the bondablemetal pad 66 that is covered by a protection layer 74 and electricallylinking the bondable metal pad 66 with the top interconnection metallayer 68, and a stress-buffering dielectric 76 located between thebondable metal pad 66 and the top interconnection metal layer 68.

The active circuit region 64 may include input/output (I/O)devices/circuits or electrostatic discharge (ESD) devices/circuits on asemiconductor substrate 77, and are made up of metal-oxide-semiconductorfield-effect transistors (MOSFET) 78, 80, and 82, shallow trenchisolations (STI) 84 and 86, ion diffusion regions 88, 90, 92, 94, and96, an inter-layer dielectric (ILD) 98, inter-metal dielectrics (IMD)100, 102, 104 and 106, and interconnection metal layers 108, 110, 112,114, 116, 118, and 120. For the sake of simplicity, an integratedcircuit having five levels of metal interconnections is taken as anexample and is illustrated in FIG. 2. However, a person skilled in theart will appreciate that the number of metal interconnections should notbe limited thereto. For example, the present invention can also beapplied in integrated circuits with six, seven, or even higher levels ofmetal interconnections.

As shown in FIG. 2, the interconnection metal layers 108 and 110 aredefined in the inter-layer dielectric 98 and electrically link with themetal-oxide-semiconductor field-effect transistors (MOSFET) 78, 80, and82, the shallow trench isolations (STI) 84 and 86, the ion diffusionregions 88, 90, 92, 94, and 96 by a contact plug 121. The inter-layerdielectric 98 is silicon oxide (SiO2), fluoride silicate glass (FSG), orother low dielectric constant materials. According to the firstembodiment of the present invention, the top interconnection metal layer68, the interconnection metal layers 108, 110, 112, 114, 116, 118, and120 are interconnection copper metal layers and are manufactured by astandard copper damascene process or dual damascene process.

As shown in FIG. 2, the interconnection metal layers 112, 114, and 116are defined in the inter-metal dielectric 100 by a copper damasceneprocess, and a via plug 122, which electrically links theinterconnection metal layer 108 with the interconnection metal layer112, and the interconnection metal layers 112 are made by a copperdamascene process simultaneously in the inter-metal dielectric 100. Theinter-metal dielectric 100 is formed by low dielectric constantmaterials or ultra-low dielectric constant materials. Here, the saidultra-low dielectric constant materials are dielectrics having adielectric constant less than 2.5, and the structure is usually porousand fragile. The interconnection metal layers 118 is defined in theinter-metal dielectric 102 by a copper damascene process, and a via plug124, which electrically links the interconnection metal layer 114 withthe interconnection metal layer 118, is made by a copper damasceneprocess in the inter-metal dielectric 102. The inter-metal dielectric102 is formed by low dielectric constant materials. The interconnectionmetal layer 120 is defined in the inter-metal dielectric 104 by a copperdamascene process, and via plugs 126, 128, and 130 which electricallylink the interconnection metal layer 118 with the interconnection metallayer 120, are made by a copper damascene process in the inter-metaldielectric 104. The inter-metal dielectric 104 is formed by lowdielectric constant materials. The top interconnection metal layer 68 isdefined in the inter-metal dielectric 106 by a copper damascene process.A plurality of second via plugs 132, 134, and 136, located beneath asection of the bondable metal pad 66 that is covered by the protectionlayer 74, electrically link the top interconnection metal layer 74 withthe interconnection metal layer 120 and are defined in the inter-metaldielectric 106 by a copper damascene process. The inter-metal dielectric106 is formed by low dielectric constant materials.

The bondable metal pad 66 is covered on the stress-buffering dielectric76, and the first via plugs 70 and 72 electrically linking the topinterconnection metal layer 68 with the bondable metal pad 66 aredefined in the stress-buffering dielectric 76. Since thestress-buffering dielectric 76 is made of silicon oxide or other lessporous and denser dielectric materials, the stress-buffering dielectric76 is denser than each inter-metal dielectric and is able to absorb thestress generated during bonding. As above, in the first embodiment ofthe present invention, the bondable metal pad 66 and the first via plugs70 and 72 are made of aluminum and are formed by a traditional aluminumwiring process. The protection layer 74 on the top of the BOACintegrated circuit structure 60 is silicon nitride (SiN), polyimide, orother protection materials that have the same utility. The protectionlayer 74 further includes bonding opening exposing a portion of the topsurface of the bondable metal pad 66 to form a bonding window region138.

FIG. 3 is a schematic cross-sectional diagram of a BOAC integratedcircuit structure according to a second embodiment of the presentinvention. As shown in FIG. 3, the first via plugs 70 and 72 linking thebondable metal pad 66 with the top interconnection metal layer 68 can beequally disposed beneath the bonding window region 138 in thestress-buffering layer 76 depending on the size of the bonding windowregion 138. Moreover, the region beneath the bonding window region 138may further include a metal frame 140 made of copper in any inter-metaldielectric under the top interconnection metal layer 68 such as theinter-metal dielectric 104. The metal frame 140 serves as areinforcement supporting structure. During bonding, a part of themechanical stress exerted on the bondable metal pad 66 is absorbed bythe stress-buffering dielectric layer 76 and is offset by the metalframe 140. FIG. 4 is a top view of the metal frame 140 according to thesecond embodiment of the present invention. As shown in FIG. 4, themetal frame 140 is located in the inter-metal dielectric 104.

In comparison with the prior art, in the present invention, since thefirst via plug linking the bondable metal pad with the topinterconnection metal layer and the second via plug linking the bondingpad structure with the interconnection metal layer are disposed beneaththe bondable metal pad, the wiring area will be diminished and the chipsize will be shrunk. Moreover, since the BOAC integrated circuitstructure of the present invention further includes the stress-bufferingdielectric between the bondable metal pad and the top interconnectionmetal layer, mechanical stresses pressing on the top interconnectionmetal layer directly during bonding will be reduced. Additionally, theintegrated circuit will not be damaged. The present further includes themetal frame serving as a reinforcement supporting structure. Since thewire between the bondable metal pad and the lower active circuit of thepresent invention is shorter, the electric characteristics will bebetter.

Those skilled in the art will readily observe that numerousmodifications and alterations of the device and method may be made whileretaining the teachings of the invention. Accordingly, the abovedisclosure should be construed as limited only by the metes and boundsof the appended claims.

1. A semiconductor chip capable of implementing wire bonding over activecircuits, comprising: a bondable metal pad; a stress-bufferingdielectric positioned under the bondable metal pad for absorbingstresses produced while bonding; at least an inter-metal dielectric(IMD) positioned under the stress-buffering dielectric; aninterconnection metal layer defined in the inter-metal dielectric; ametal frame defined in the inter-metal dielectric and electricallyisolated from the interconnection metal layer for offsetting thestresses, wherein the metal frame is positioned exactly under thebondable metal pad; and an active circuit positioned under the bondablemetal pad on a semiconductor substrate.
 2. The semiconductor chip ofclaim 1 further comprising: a top interconnection metal layer positionedbetween the bondable metal pad and the interconnection metal layer; andat least a first via plug positioned in the stress-buffering dielectricunder the bondable metal pad for electrically connecting the bondablemetal pad to the top interconnection metal layer.
 3. The semiconductorchip of claim 2, wherein the top interconnection metal layer, theinterconnection metal layer, and the metal frame are damascened bycopper.
 4. The semiconductor chip of claim 2 further comprising at leasta second via plug for electrically connecting top interconnection metallayer to the interconnection metal layer.
 5. The semiconductor chip ofclaim 1, wherein the stress-buffering dielectric is denser than theinter-metal dielectric.
 6. The semiconductor chip of claim 1, whereinthe stress-buffering dielectric is silicon oxide (SiO2).
 7. Thesemiconductor chip of claim 1 further comprising a protection layercovering the stress-buffering dielectric and a portion of the bondablemetal pad.
 8. The semiconductor chip of claim 7, wherein the protectionlayer comprises a bonding opening exposing a portion of the top surfaceof the bondable metal pad to form a bonding window region.
 9. Thesemiconductor chip of claim 7, wherein the protection layer is siliconnitride (SiN).
 10. The semiconductor chip of claim 7, wherein theprotection layer is polyimide.
 11. The semiconductor chip of claim 1further comprising at least a second via plug for electricallyconnecting the bondable metal pad to the interconnection metal layer.12. The semiconductor chip of claim 11, wherein the first via plug andthe second via plug both are positioned under the bondable metal padthat is covered by the protection layer.
 13. The semiconductor chip ofclaim 12, wherein the second via plug is positioned under the bondingwindow region.
 14. The semiconductor chip of claim 13, wherein the firstvia plug is an aluminum plug.
 15. The semiconductor chip of claim 1,wherein the bondable metal pad is an aluminum metal pad.
 16. Asemiconductor chip capable of implementing wire bonding over activecircuits comprising: a bondable metal pad; a top interconnection metallayer positioned under the bondable metal pad; at least an inter-metaldielectric (IMD) positioned under the top interconnection metal layer; ametal frame positioned in the inter-metal dielectric layer serving as areinforcement-supporting structure; and an active circuit formed on asemiconductor substrate.
 17. The semiconductor chip of claim 16 furthercomprising: a stress-buffering dielectric positioned between thebondable metal pad and the top interconnection metal layer; and at leasta first via plug positioned in the stress-buffering dielectric under thebondable metal pad for electrically connecting the bondable metal pad tothe top interconnection metal layer.
 18. The semiconductor chip of claim17, wherein the stress-buffering dielectric is used to absorb stressesproduced while bonding, and the stresses are offset by the metal frame.19. The semiconductor chip of claim 17, wherein the stress-bufferingdielectric is denser than the inter-metal dielectric.
 20. Thesemiconductor chip of claim 17, wherein the stress-buffering dielectricis silicon oxide (SiO2).
 21. The semiconductor chip of claim 17, whereinthe bondable metal pad is an aluminum metal pad and the first via plugis an aluminum plug.
 22. The semiconductor chip of claim 17 furthercomprising: a protection layer covering the stress-buffering dielectricand a portion of the bondable metal pad; and a bonding opening exposinga portion of the top surface of the bondable metal pad to form a bondingwindow region.
 23. The semiconductor chip of claim 22, wherein theprotection layer is silicon nitride.
 24. The semiconductor chip of claim22, wherein the protection layer is polyimide.
 25. The semiconductorchip of claim 22, wherein the first via plug is positioned under thebondable metal pad that is covered by the protection layer.
 26. Thesemiconductor chip of claim 25 wherein the first via plug is positionedunder the bonding window region.
 27. The semiconductor chip of claim 16further comprising an interconnection metal layer defined in theinter-metal dielectric and electrically isolated from the metal frame.28. The semiconductor chip of claim 27 further comprising at least asecond via plug positioned under the bondable metal pad that is coveredby the protection layer for electrically connecting the topinterconnection metal layer to the interconnection metal layer.
 29. Thesemiconductor chip of claim 27, wherein the interconnection metal layer,the top interconnection metal layer, and the metal frame are damascenedby copper.